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Home Semiconductor manufacture Uncooled-far-infrared-thermal-imaging-system

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 Uncooled far infrared thermal imaging system

Details
Inventors: Bly, Vincent T.;
Assignee: The United States of America as represented by the Secretary of the Army (Washington, DC)
Primary Examiner: Buczinski; Stephen C.
Assistant Examiner:
Attorney, Agent or Firm: Dunn; Aubrey J., Harwell; Max L., Gibson; Robert P.

An infrared image is directed onto a transducer having a planar array of absorbing discs, on one side. The discs are supported by a thin membrane which sags or bulges as the discs heat up. The discs thus change their spacings with respect to a partially reflective mirror. The nominal spacing between the discs and mirror is about 1/4 wave-length of the infrared radiation, such that absorption is enhanced. The mirror is supported on a transparent substrate through which visible or near-infrared radiation is shown; the mirror/discs thus establish a Fabry-Perot cavity for this radiation, whereby a visible or near-infrared image may be observed or detected as the various discs establish various spacings in accordance with incremental variations in the infrared image. An alternate embodiment uses an electrostatic field to pre-bias the discs toward the mirror and thus to tune or adjuct the sensitivity of the transducer.

DETAILED DESCRIPTION This invention is an uncooled system for converting a far-infrared image to a visible image or near-infrared image.
The system includes a transducer onto one side of which a far-infrared image is directed, and which provides either a visible image or a near-infrared image on the opposite side.
The transducer includes a planar array of far-infrared absorbing islands on a thin-film support.
The film is supported by a perforated plate, with the perforations centered on the islands.
There is, on the opposite side of the plate from the film, a perforated shield in registration with the islands, and a partially-reflective sheet.
The spacing between the sheet and the islands is such that far-infrared absorption in the islands is enhanced.
The sheet is supported by a relatively thick and (visible light or near-infrared) transparent substrate.
The bottoms of the islands on the film and the partially-reflective sheet together form a Fabry-Perot cavity for visible or near-infrared radiation directed through the substrate, whereby an image may be viewed or detected.
An alternate embodiment of the invention additionally includes thin conductors connected to the islands and to one pole of a voltage source, with the other pole of the source connected to either (or both) the shield or the partially-reflective sheet.
This voltage induces a force to bias the islands toward the substrate.



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