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Frequency-selected-variable-output-inductor-heater-system

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Frequency selected, variable output inductor heater system

Details

Inventors: Schatz, Douglas S.; Dorrenbacher, John M.;
Assignee: Advanced Energy Industries, Inc. (Fort Collins, CO)
Primary Examiner: Leung; Philip H.
Assistant Examiner:
Attorney, Agent or Firm: Santangelo Law Offices, P.C.

An induction heating systems using a plurality of zones in a coil provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones to have different resonance frequencies, the power supply may control the various zones by altering its frequency output. The power supply may also act to control the differential heating by switching among zones in conjunction with the frequency control, by sweeping through a variety of frequencies, by simultaneously providing power over different frequencies, by altering the residence time at each frequency, or by outputting different powers to each frequency or the like. Each zone may thus be tuned as appropriate to achieve the desired induction heating characteristic.

DETAILED DESCRIPTION We claim: 1.
A multizone induction heating system comprising: a.
a coil system divided into a plurality of zones, at least two of said zones having an electrical resonance frequency, said resonance frequencies having at least two different values; b.
a power supply having an output frequency; and c.
a control system to control the power delivered to each of said zones comprising a control circuit to change said output frequency of said power supply.
2.
A multizone induction heating system as described in claim 1 wherein said coil system comprises a plurality of coils.
3.
A multizone induction heating system as described in claim 1 wherein said coil system comprises at least one coil divided into a plurality of sections.
4.
A multizone induction heating system as described in claim 1 wherein said control system further comprises a circuit to switch said output frequency among at least two operating frequencies.
5.
A multizone induction heating system as described in claim 4 wherein said control system further comprises a circuit to vary the output power of said power supply while said output frequency is switched among said operating frequencies.
6.
A multizone induction heating system as described in claim 4 wherein said control system further comprises a circuit to vary the residence times at each of said operating frequencies of said power supply.
7.
A multizone induction heating system as described in claim 1 wherein said control system further comprises a circuit to vary said output frequency continuously over a range of frequencies.
8.
A multizone induction heating system comprising: a.
a coil system divided into a plurality of zones, at least two of said zones having an electrical resonance frequency, said resonance frequencies having at least two different values; b.
a power supply having at least two simultaneously emitted output frequencies; c.
a control system to control the power delivered to each of said zones wherein said at least two output frequencies are established to cause differentiated amounts of inductive heating by said zones

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