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Vibration and Earthquake Isolation

Vibration-damper

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Vibration damper

Details

Inventors: Yeh, David;
Assignee: United Silicon Incorporated (Hsinchu, TW)
Primary Examiner: King; Anita M.
Assistant Examiner:
Attorney, Agent or Firm:

A vibration damper is described. A vibration damper with a high dampening ability is required for a scanner because of the requirement of the 0.18 .mu.m size devices. The vibration damper is placed between a machine and a floor. The vibration damper has an I-shaped girder structure and a material filling the space between the floor and I-shaped girder structure. A support element having two layers of latticed armatures is mounted on the I-shaped girder structure. The support element is filled with cement. A layer of vibration absorber is placed on the cement.

DETAILED DESCRIPTION The invention achieves the above-identified object by providing a vibration damper between a semiconductor manufacturing machine and a floor.
The vibration damper has an 1-shaped girder structure and a material filling the space between the floor and I-shaped girder structure.
A support element having two layers of latticed armatures is mounted on the I-shaped girder structure.
The support element is filled with cement.
A layer of vibration absorber is placed on the cement.
The total weight of the vibration damper does not exceed 3000kg due to the use of simple materials.
The vibration damper of the invention has high vibration-proof ability.

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